PROCESS TECHNOLOGY FOR MASS-PRODUCTION OF LARGE-AREA A-SI SOLAR MODULES

被引：5

作者：

BUBENZER, A ^{[1
]}

LECHNER, P ^{[1
]}

SCHADE, H ^{[1
]}

RUBEL, H ^{[1
]}

机构：

[1] PHOTOTRON SOLARTECH GMBH,D-85640 PUTZBRUNN,GERMANY

来源：

SOLAR ENERGY MATERIALS AND SOLAR CELLS | 1994年 / 34卷 / 1-4期

关键词：

D O I：

10.1016/0927-0248(94)90059-0

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

The production of large-area (0.6 x 1.0 m(2)) modules takes place in a fully automated semiconductor line and a semi-automated panel finishing line. The a-Si deposition occurs in a multichamber reactor for parallel processing of p-, i- and n-layers which provides for flexibility in the cell design (single- and multijunction structures) without significant loss in throughput. Specific aspects of module construction, namely the properties of commercially available large-area TCO substrates, scale-up of the PECVD process, and patterning for color-neutral semitransparent modules, are discussed. The module production is now based exclusively on a-Si/a-Si tandem structures. The average power output is initially 36 W, and stabilizes around 15% below that level.

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页码：347 / 358

页数：12

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