PLASMA-ETCHING IN A MULTIPOLAR DISCHARGE

被引：50

|

作者：

WICKER, TE ^{[1
]}

MANTEI, TD ^{[1
]}

机构：

[1] UNIV CINCINNATI,DEPT ELECT & COMP ENGN,CINCINNATI,OH 45221

来源：

JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 05期

关键词：

D O I：

10.1063/1.334484

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：1638 / 1647

页数：10

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