NANOWRITER - A NEW HIGH-VOLTAGE ELECTRON-BEAM LITHOGRAPHY SYSTEM FOR NANOMETER-SCALE FABRICATION

被引：24
|
作者：
CHEN, ZW
JONES, GAC
AHMED, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期
关键词：
D O I：
10.1116/1.584119
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：2009 / 2013
页数：5
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