ROLL-TO-ROLL PLASMA DEPOSITION MACHINE FOR THE PRODUCTION OF TANDEM AMORPHOUS-SILICON ALLOY SOLAR-CELLS

被引：8
|
作者：
IZU, M
OVSHINSKY, SR
机构：
来源：
THIN SOLID FILMS | 1984年 / 119卷 / 01期
关键词：
D O I：
10.1016/0040-6090(84)90156-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：55 / 58
页数：4
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