EXCIMER-LASER GAS-ASSISTED DEPOSITION OF CRYSTALLINE AND AMORPHOUS FILMS

被引：4
|
作者：
REDDY, KV
机构：
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS | 1986年 / 3卷 / 05期
关键词：
D O I：
10.1364/JOSAB.3.000801
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：801 / 805
页数：5
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