OXIDATION OF SILICON-NITRIDE IN A WET ATMOSPHERE

被引：22
|
作者：
MAEDA, M
NAKAMURA, K
OHKUBO, T
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1989年 / 24卷 / 06期
关键词：
D O I：
10.1007/BF02385430
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：2120 / 2126
页数：7
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