OXYGEN IN TITANIUM NITRIDE DIFFUSION-BARRIERS

被引：112
|
作者：
SINKE, W
FRIJILINK, GPA
SARIS, FW
机构：
来源：
APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 05期
关键词：
D O I：
10.1063/1.96151
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：471 / 473
页数：3
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