OXYGEN IN TITANIUM NITRIDE DIFFUSION-BARRIERS

被引：112

|

作者：

SINKE, W

FRIJILINK, GPA

SARIS, FW

机构：

来源：

APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 05期

关键词：

D O I：

10.1063/1.96151

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：471 / 473

页数：3

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