STABLE CURRENT GENERATOR FOR ELECTRON-BEAM DEFLECTION

被引：0
|
作者：
VYUKHIN, VN
KOVALEV, EA
机构：
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 1982年 / 25卷 / 01期
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：147 / 149
页数：3
相关论文
共 50 条
  • [41] CURRENT AMPLIFICATION IN A RELATIVISTIC ELECTRON-BEAM
    WACHTEL, JM
    SAFRAN, S
    PHYSICAL REVIEW LETTERS, 1974, 32 (03) : 95 - 98
  • [42] LARGE FIELD DEFLECTION SYSTEM FOR SCANNING ELECTRON-BEAM TECHNOLOGY
    OWEN, G
    NIXON, WC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (03) : C109 - C109
  • [43] GYROCONS AND MAGNICONS - MICROWAVE GENERATORS WITH CIRCULAR DEFLECTION OF THE ELECTRON-BEAM
    NEZHEVENKO, OA
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1994, 22 (05) : 756 - 772
  • [44] Computer-aided electron-beam deflection control system
    Koleva, E.
    Koleva, L.
    Mladenov, G.
    Trushnikov, D.
    Andonov, A.
    21ST INTERNATIONAL SUMMER SCHOOL ON VACUUM, ELECTRON AND ION TECHNOLOGIES, 2020, 1492
  • [45] DESIGN OF FAST DEFLECTION COILS FOR AN ELECTRON-BEAM MICROFABRICATION SYSTEM
    AMBOSS, K
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1152 - 1155
  • [46] AN EXPERIMENTAL-TECHNIQUE FOR THE ASSESSMENT OF ELECTRON-BEAM DEFLECTION ERRORS
    RAO, VRM
    NIXON, WC
    OPTIK, 1980, 56 (01): : 113 - 122
  • [47] ELECTRON-BEAM LITHOGRAPHY FOR LARGE-AREA PATTERNING .3. DATA CONVERSION AND ELECTRON-BEAM DEFLECTION CONTROL
    HOSHINOUCHI, S
    TOBUSE, H
    MURAKAMI, H
    SHIMIZU, R
    SCANNING MICROSCOPY, 1993, 7 (01) : 49 - 55
  • [48] A METHOD TO REDUCE DEFLECTION ABERRATIONS IN ELECTRON-BEAM LITHOGRAPHY SYSTEMS
    KNAUER, W
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1042 - 1047
  • [49] CURRENT-PASSAGE CHARACTERISTICS OF HEAVY-CURRENT ELECTRON-BEAM VALVE IN THE ELECTRON-BEAM RETARDING REGIME
    MATVEEV, NV
    RADIOTEKHNIKA I ELEKTRONIKA, 1987, 32 (05): : 1092 - 1100
  • [50] Analyzing the dynamic characteristics of the beam-deflection channel in an electron-beam unit
    Rubtsov V.P.
    Shcherbakov A.V.
    Russian Electrical Engineering, 1600, Allerton Press Incorporation (85): : 91 - 95
12345