SILICON DIOXIDE PROFILE CONTROL FOR CONTACTS AND VIAS

被引：0
|
作者：
GIFFEN, L
WU, J
LACHENBRUCH, R
FIOR, G
机构：
来源：
SOLID STATE TECHNOLOGY | 1989年 / 32卷 / 04期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：55 / 57
页数：3
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