ELECTRON INTERFEROMETRY USING A COHERENT BEAM FROM POINT ELECTRON SOURCE

Using the electron holography principle, a coherent field-emission electron beam is employed to quantitatively measure to a precision of 277-/100 the phase distribution of an electron wave function transmitted through or reflected from a sample. This technique opens up the possibility of previously impossible high-precision measurements such as the quantitative measurement of magnetic lines of force in a microscopic region, and thickness measurement in atomic dimensions. © 1990, American Vacuum Society. All rights reserved.