RAMAN-SCATTERING FROM ULTRAHEAVILY-ION-IMPLANTED AND LASER-ANNEALED SILICON

被引:10
|
作者
SHUKLA, AK
JAIN, KP
机构
来源
PHYSICAL REVIEW B | 1986年 / 34卷 / 12期
关键词
D O I
10.1103/PhysRevB.34.8950
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:8950 / 8953
页数:4
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