STRUCTURAL-CHANGES IN THIN GLOW-POLYMERIZED FLUOROCARBON FILMS DURING AGING AND TEMPERING

被引：5

|

作者：

FRIEDRICH, M

HINZE, D

EBERT, W

机构：

来源：

THIN SOLID FILMS | 1984年 / 112卷 / 01期

关键词：

D O I：

10.1016/0040-6090(84)90502-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：61 / 69

页数：9

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