STRUCTURAL-CHANGES OF POWDERED TANTALUM FILMS DURING STABILIZATION OF DEPOSIT CONDITIONS

被引：0
|
作者：
CHRISTENSEN, O [1 ]
MARHIC, C [1 ]
KLEIN, BJ [1 ]
BARBEZAT, S [1 ]
机构：
[1] CNRS,LAB PHYS MAT,F-92190 BELLEVUE,FRANCE
来源：
THIN SOLID FILMS | 1975年 / 27卷 / 01期
关键词：
D O I：
10.1016/0040-6090(75)90005-X
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：39 / 47
页数：9
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