STRUCTURAL-CHANGES OF POWDERED TANTALUM FILMS DURING STABILIZATION OF DEPOSIT CONDITIONS

被引：0

作者：

CHRISTENSEN, O ^{[1
]}

MARHIC, C ^{[1
]}

KLEIN, BJ ^{[1
]}

BARBEZAT, S ^{[1
]}

机构：

[1] CNRS,LAB PHYS MAT,F-92190 BELLEVUE,FRANCE

来源：

THIN SOLID FILMS | 1975年 / 27卷 / 01期

关键词：

D O I：

10.1016/0040-6090(75)90005-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：39 / 47

页数：9

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