STRUCTURAL-CHANGES IN THIN GLOW-POLYMERIZED FLUOROCARBON FILMS DURING AGING AND TEMPERING

被引：5
|
作者：
FRIEDRICH, M
HINZE, D
EBERT, W
机构：
来源：
THIN SOLID FILMS | 1984年 / 112卷 / 01期
关键词：
D O I：
10.1016/0040-6090(84)90502-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：61 / 69
页数：9
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