DENSITY OF THIN EVAPORATED ALUMINUM FILMS

被引：33

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作者：

HARTMAN, TE

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1965年 / 2卷 / 05期

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D O I：

10.1116/1.1492434

中图分类号：

O59 [应用物理学];

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页码：239 / &

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