DENSITY OF THIN EVAPORATED ALUMINUM FILMS

被引：33
|
作者：
HARTMAN, TE
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1965年 / 2卷 / 05期
关键词：
D O I：
10.1116/1.1492434
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：239 / &
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