SOLID-PHASE REGROWTH OF LOW-TEMPERATURE BE-IMPLANTED GAAS

被引：14
|
作者：
KWUN, S
LEE, MH
LIOU, LL
SPITZER, WG
DUNLAP, HL
VAIDYANATHAN, KV
机构：
[1] UNIV SO CALIF,DEPT MAT SCI,LOS ANGELES,CA 90089
[2] UNIV SO CALIF,DEPT PHYS,LOS ANGELES,CA 90089
[3] HUGHES RES LABS,MALIBU,CA 90265
来源：
JOURNAL OF APPLIED PHYSICS | 1985年 / 57卷 / 04期
关键词：
D O I：
10.1063/1.334542
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1022 / 1028
页数：7
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