Impact of the chemical concentration on the solid-phase epitaxial regrowth of phosphorus implanted preamorphized germanium

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作者：
Simoen, E. [1 ]
Brugre, A. [1 ,2 ]
Satta, A. [1 ]
Firrincieli, A. [1 ]
Van Daele, B. [1 ]
Brijs, B. [1 ]
Richard, O. [1 ]
Geypen, J. [1 ]
Meuris, M. [1 ]
Vandervorst, W. [1 ,3 ]
机构：
[1] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
[2] INPG, Minatec, Grenoble, France
[3] IKS-Dept Physics, KU Leuven, Celestijnenlaan 200-D, B-3001 Leuven, Belgium
来源：
Journal of Applied Physics | 2009年 / 105卷 / 09期
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