POLYMER MATERIALS FOR MICROLITHOGRAPHY

被引：154
|
作者：
REICHMANIS, E
THOMPSON, LF
机构：
来源：
CHEMICAL REVIEWS | 1989年 / 89卷 / 06期
关键词：
D O I：
10.1021/cr00096a001
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
收藏
页码：1273 / 1289
页数：17
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