SIMULATION OF THIN-FILM STEP COVERAGE AND MICROSTRUCTURE

被引：4
|
作者：
BRETT, MJ
WESTRA, KL
SMY, T
机构：
来源：
CANADIAN JOURNAL OF PHYSICS | 1989年 / 67卷 / 04期
关键词：
D O I：
10.1139/p89-061
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：347 / 350
页数：4
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