SIMULATION OF THIN-FILM STEP COVERAGE AND MICROSTRUCTURE

被引：4
|
作者：
BRETT, MJ
WESTRA, KL
SMY, T
机构：
来源：
CANADIAN JOURNAL OF PHYSICS | 1989年 / 67卷 / 04期
关键词：
D O I：
10.1139/p89-061
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：347 / 350
页数：4
相关论文
共 50 条
  • [11] CRITICAL ISSUES IN THIN-FILM MICROSTRUCTURE DEVELOPMENT
    SINGH, RK
    RAJAN, K
    JOURNAL OF ELECTRONIC MATERIALS, 1994, 23 (09) : 913 - 918
  • [12] THE MICROSTRUCTURE OF THIN-FILM MAGNETIC RECORDING DISKS
    JONES, GA
    SRINIVASAN, DR
    GRUNDY, PJ
    KEELER, GJ
    JOURNAL OF MATERIALS SCIENCE, 1992, 27 (22) : 6244 - 6248
  • [13] Magnetic properties and microstructure of thin-film media
    Chantrell, RW
    Tako, KM
    Wongsam, M
    Walmsley, N
    Schrefl, T
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1997, 175 (1-2) : 137 - 147
  • [14] Microstructure and micromagnetics of future thin-film media
    Futamoto, M
    Inaba, N
    Hirayama, Y
    Ito, K
    Honda, Y
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 1999, 193 (1-3) : 36 - 43
  • [15] Statistical simulation of thin-film bearings
    Jiang, JZ
    Shen, C
    Fan, J
    RAREFIED GAS DYNAMICS, 2005, 762 : 180 - 185
  • [16] MEASUREMENT OF OPACITY AND COVERAGE IN THIN-FILM POWDER COATINGS
    RICHART, DS
    GRAY, KW
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1972, 164 (AUG-S): : 78 - &
  • [17] ITO THIN-FILM TRANSPARENT CONDUCTORS - MICROSTRUCTURE AND PROCESSING
    SHIGESATO, Y
    YASUI, I
    PAINE, DC
    JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY, 1995, 47 (03): : 47 - 50
  • [18] ITO thin-film transparent conductors: microstructure and processing
    Univ of Tokyo, Tokyo, Japan
    JOM, 3 (47-50):
  • [19] From light scattering to the microstructure of thin-film multilayers
    Amra, C.
    Applied Optics, 1993, 32 (28): : 5481 - 5491
  • [20] EFFECT OF SUBSTRATE TEMPERATURE ON MICROSTRUCTURE OF THIN-FILM SILICIDE
    KOSTER, U
    TU, KN
    HO, PS
    APPLIED PHYSICS LETTERS, 1977, 31 (09) : 634 - 636
12345