SIMULATION OF THIN-FILM STEP COVERAGE AND MICROSTRUCTURE

被引：4
|
作者：
BRETT, MJ
WESTRA, KL
SMY, T
机构：
来源：
CANADIAN JOURNAL OF PHYSICS | 1989年 / 67卷 / 04期
关键词：
D O I：
10.1139/p89-061
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
收藏
页码：347 / 350
页数：4
相关论文
共 50 条
  • [1] PLASMA-DEPOSITED THIN-FILM STEP COVERAGE CALCULATED BY COMPUTER-SIMULATION
    ROSS, RC
    VOSSEN, JL
    [J]. APPLIED PHYSICS LETTERS, 1984, 45 (03) : 239 - 240
  • [2] THIN-FILM MICROSTRUCTURE MODELING
    BANGJUN, L
    MACLEOD, HA
    [J]. PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS, 1985, 540 : 150 - 155
  • [3] THIN-FILM MICROSTRUCTURE MODELING THROUGH LINE-SEGMENT SIMULATION
    FRIEDRICH, LJ
    DEW, SK
    BRETT, M
    SMY, T
    [J]. THIN SOLID FILMS, 1995, 266 (01) : 83 - 88
  • [4] SIMULATION OF THIN-FILM GROWTH
    HRACH, R
    [J]. INTERNATIONAL JOURNAL OF ELECTRONICS, 1990, 69 (01) : 55 - 64
  • [5] THE SIMULATION OF THIN-FILM GROWTH
    HRACH, R
    STARY, V
    [J]. THIN SOLID FILMS, 1981, 85 (3-4) : 285 - 292
  • [6] THIN-FILM THICKNESS STEP GAUGE
    GUPTA, SK
    KAPIL, AK
    SINGAL, CM
    SRIVASTAVA, VK
    [J]. PRAMANA, 1976, 7 (06) : 397 - 400
  • [7] SIMULATION OF THIN-FILM GROWTH
    XIA, MH
    LIU, X
    GU, PF
    [J]. APPLIED OPTICS, 1993, 32 (28): : 5443 - 5446
  • [8] NEW PROBE OF THIN-FILM MICROSTRUCTURE
    MIZRAHI, V
    SUITS, F
    SIPE, JE
    GIBSON, UJ
    STEGEMAN, GI
    [J]. APPLIED PHYSICS LETTERS, 1987, 51 (06) : 427 - 429
  • [9] DEPENDENCE OF THIN-FILM MICROSTRUCTURE ON DEPOSITION RATE BY MEANS OF A COMPUTER-SIMULATION
    MULLER, KH
    [J]. JOURNAL OF APPLIED PHYSICS, 1985, 58 (07) : 2573 - 2576
  • [10] SIMULATION OF ANTIMONY THIN-FILM GROWTH
    MULLER, H
    [J]. ACTA PHYSICA ACADEMIAE SCIENTIARUM HUNGARICAE, 1980, 49 (1-3): : 189 - 189
12345