COMPACT METAL-ION BEAM SOURCE USING THERMAL CONTACT IONIZER

被引：7
|
作者：
SAKAI, Y
KATSUMATA, I
OSHIO, T
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1983年 / 22卷 / 06期
关键词：
D O I：
10.1143/JJAP.22.1048
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1048 / 1056
页数：9
相关论文
共 50 条
  • [41] THE MEVVA ION-SOURCE FOR HIGH-CURRENT METAL-ION IMPLANTATION
    BROWN, I
    WASHBURN, J
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1987, 21 (2-4): : 201 - 204
  • [42] NEGATIVE METAL-ION SOURCE FOR SECONDARY-ION MASS-SPECTROMETRY
    YURIMOTO, H
    MORI, Y
    YAMAMOTO, H
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1993, 64 (05): : 1146 - 1149
  • [43] INVESTIGATION OF MEVVA ION-SOURCE FOR METAL-ION INJECTION INTO ACCELERATORS AT GSI
    WOLF, BH
    EMIG, H
    RUCK, D
    SPADTKE, P
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (10): : 3091 - 3098
  • [44] Characterization of compact ICP ion source for focused ion beam applications
    Nabhiraj, P. Y.
    Menon, Ranjini
    Rao, G. Mohan
    Mohan, S.
    Bhandari, R. K.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2010, 621 (1-3): : 57 - 61
  • [45] METAL-ION SOURCE USING HIGH-POWER DENSITY ELECTRON-IMPACT TECHNIQUE
    BEG, S
    MALIK, NA
    INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1978, 27 (01): : 49 - 53
  • [46] CU+ ION EXTRACTION FROM A MODIFIED BERNAS ION SOURCE IN A METAL-ION IMPLANTER
    Hong, In-Seok
    Lee, Hwa-Ryun
    Trinh, Tu Anh
    Cho, Yong-Sub
    NUCLEAR ENGINEERING AND TECHNOLOGY, 2009, 41 (05) : 709 - 714
  • [47] Production of a Li- ion beam from a thermal contact-ionization plasma source
    Fukuura, Y
    Murakami, K
    Masuoka, T
    Katsumata, I
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (03): : 1199 - 1201
  • [48] ION-BEAM MODIFICATION OF THE Y-BA-CU-O SYSTEM WITH THE MEVVA HIGH-CURRENT METAL-ION SOURCE
    BROWN, IG
    RUBIN, MD
    YU, KM
    MUTIKAINEN, R
    CHEUNG, NW
    ION BEAM PROCESSING OF ADVANCED ELECTRONIC MATERIALS, 1989, 147 : 391 - 395
  • [49] VACUUM-ARC ARRAYS FOR INTENSE METAL-ION BEAM INJECTORS
    BURKHART, C
    COFFEY, S
    COOPER, G
    HUMPHRIES, S
    LEN, LK
    LOGAN, AD
    SAVAGE, M
    WOODALL, DM
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 10-1 (MAY): : 792 - 795
  • [50] Pseudo ribbon metal ion beam source
    Stepanov, Igor B.
    Ryabchikov, Alexander I.
    Sivin, Denis O.
    Verigin, Dan A.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (02):
12345