COMPACT METAL-ION BEAM SOURCE USING THERMAL CONTACT IONIZER

被引：7
|
作者：
SAKAI, Y
KATSUMATA, I
OSHIO, T
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1983年 / 22卷 / 06期
关键词：
D O I：
10.1143/JJAP.22.1048
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1048 / 1056
页数：9
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