ELECTRON CHANNELING IN THE SCANNING ELECTRON-MICROSCOPE FOR MONITORING THE THICKNESSES OF RESIDUAL OXIDE-FILMS ON SEMICONDUCTOR SUBSTRATES

被引：0

作者：

VINOGRADOVA, NS

NOSIKOV, SV

SOROKIN, IN

SOSNOVSKIKH, YN

机构：

来源：

INDUSTRIAL LABORATORY | 1986年 / 52卷 / 12期

关键词：

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：1107 / 1108

页数：2

共 50 条

[31] SHIELDED SCANNING ELECTRON-MICROSCOPE
YAMANOUCHI, S
KASHIHARA, H
EGUCHI, H
HONME, S
JOURNAL OF ELECTRON MICROSCOPY, 1974, 23 (03): : 139 - 145
[32] STEREOVISION IN A SCANNING ELECTRON-MICROSCOPE
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ABRAMOV, GL
SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1979, 46 (08): : 449 - 452
[33] ELECTRON-SPECTROSCOPY IN THE SCANNING ELECTRON-MICROSCOPE
SEILER, H
ULTRAMICROSCOPY, 1985, 17 (01) : 1 - 8
[34] SCANNING ELECTRON MICROSCOPE-BASED METROLOGICAL ELECTRON-MICROSCOPE SYSTEM AND NEW PROTOTYPE SCANNING ELECTRON-MICROSCOPE MAGNIFICATION STANDARD
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[35] SCANNING TUNNELING MICROSCOPE COMBINED WITH SCANNING ELECTRON-MICROSCOPE
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MIYAZAKI, Y
KOGA, Y
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[36] THE COMBINATION OF A SCANNING TUNNELING MICROSCOPE WITH A SCANNING ELECTRON-MICROSCOPE
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BARTOLOME, A
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INSTITUTE OF PHYSICS CONFERENCE SERIES, 1988, (93): : 283 - 283
[37] SCANNING TUNNELING MICROSCOPE COMBINED WITH A SCANNING ELECTRON-MICROSCOPE
GERBER, C
BINNIG, G
FUCHS, H
MARTI, O
ROHRER, H
REVIEW OF SCIENTIFIC INSTRUMENTS, 1986, 57 (02): : 221 - 224
[38] COMBINATION OF A SCANNING TUNNELING MICROSCOPE WITH A SCANNING ELECTRON-MICROSCOPE
VAZQUEZ, L
BARTOLOME, A
GARCIA, R
BUENDIA, A
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REVIEW OF SCIENTIFIC INSTRUMENTS, 1988, 59 (08): : 1286 - 1289
[39] THE COMBINATION OF A SCANNING TUNNELING MICROSCOPE WITH A SCANNING ELECTRON-MICROSCOPE
BARO, AM
VAZQUEZ, L
BARTOLOME, A
GARCIA, R
EUREM 88, VOLS 1-3: TUTORIALS, INSTRUMENTATION AND TECHNIQUES / PHYSICS AND MATERIALS / BIOLOGY, 1988, 93 : 283 - 283
[40] DOMAIN OBSERVATION IN GARNET-FILMS WITH SCANNING ELECTRON-MICROSCOPE
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DUNK, P
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