PRODUCTION OF LARGE-DIAMETER MICROWAVE PLASMA USING AN ANNULAR SLOT ANTENNA

被引：17
|
作者：
IKUSHIMA, T
OKUNO, Y
FUJITA, H
机构：
[1] Department of Electrical Engineering, Saga University, Saga 840
来源：
APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 01期
关键词：
D O I：
10.1063/1.110905
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A new production method for a large diameter microwave plasma is proposed without magnetic coils. An annular slot antenna and two ring-typed permanent magnets are used for the generation of high density plasma in the circumference of a chamber with the plasma confinement and diffusing to the central region. The optimum arrangement of components in the device is examined for the production of the large diameter uniform plasma. The almost uniform electron density of about 4x10(10) cm-3 is realized, and the plasma with two electron temperatures is observed. The measurement with a directional ion energy analyzer reveals that ions are almost isotropic.
引用
收藏
页码：25 / 27
页数：3
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