共 50 条
- [1] Observation of electromagnetic waves in a large-diameter uniform electron cyclotron resonance plasma by a multislot antenna SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3): : 1341 - 1346
- [2] Production of a large diameter electron cyclotron resonance plasma using a multislot antenna for plasma application REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (12): : 5423 - 5427
- [3] Production of a large diameter electron cyclotron resonance plasma using a multislot antenna for plasma application Review of Scientific Instruments, 1995, 66 (12):
- [4] Large-diameter reactive plasma produced by a plane electron cyclotron resonance antenna Ishida, Takeshige, 1600, JJAP, Minato-ku, Japan (33):
- [5] LARGE-DIAMETER REACTIVE PLASMA PRODUCED BY A PLANE ELECTRON-CYCLOTRON-RESONANCE ANTENNA JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (7B): : 4236 - 4238
- [8] Electron cyclotron resonance devices with permanent magnets for production of large-diameter uniform plasmas Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1994, 33 (7 B): : 4221 - 4225
- [10] Production mechanism of a large-diameter uniform electron cyclotron resonance plasma generated by a circular TE01 mode microwave Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1994, 33 (5 A): : 2712 - 2717