Observation of electromagnetic waves in a large-diameter uniform electron cyclotron resonance plasma by a multislot antenna

被引：0
|
作者：
Ueda, Yoko [1 ]
Kawai, Yoshinobu [1 ]
机构：
[1] Interdisc. Grad. Sch. of Eng. Sci., Kyushu University, Kasuga, Fukuoka 816, Japan
来源：
Surface and Coatings Technology | 1998年 / 98卷 / 1-3期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1341 / 1346
相关论文
共 50 条
  • [31] Large diameter, ultra-high-frequency electron cyclotron resonance plasma for oxide etching
    Yokogawa, K
    Itabashi, N
    Suzuki, K
    Tachi, S
    PROCEEDINGS OF THE SYMPOSIUM ON SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS, 1997, 97 (10): : 493 - 502
  • [32] Propagation of electromagnetic waves in the plasma near electron cyclotron resonance: Undulator-induced transparency
    Shvets, G
    Tushentsov, M
    Tokman, MD
    Kryachko, A
    PHYSICS OF PLASMAS, 2005, 12 (05)
  • [33] Observation of electron plasma waves inside large amplitude electromagnetic pulses in a temporally growing plasma
    Pandey, Shail
    Bhattacharjee, Sudeep
    Sahu, Debaprasad
    PHYSICS OF PLASMAS, 2012, 19 (01)
  • [34] Modelling and characterization of a large-diameter plasma cylinder produced by surface waves
    Viel, V
    Bernard, J
    Laval, G
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1996, 29 (06) : 1500 - 1508
  • [35] Production of large-diameter uniform plasma in mTorr range using microwave discharge
    Yasaka, Y
    Nozaki, D
    Koga, K
    Ando, M
    Yamamoto, T
    Goto, N
    Ishii, N
    Morimoto, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (7B): : 4309 - 4312
  • [36] Effect of upper hybrid waves on uniform electron cyclotron resonance plasmas
    Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga, Fukuoka 816, Japan
    J. Vac. Sci. Technol. A Vac. Surf. Films, 3 (1454-1458):
  • [37] Effect of upper hybrid waves on uniform electron cyclotron resonance plasmas
    Ueda, Y
    Kawai, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1454 - 1458
  • [38] Characteristics of large-diameter plasma using a radial-line slot antenna
    Tian, C.
    Nozawa, T.
    Ishibasi, K.
    Kameyama, H.
    Morimoto, T.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2006, 24 (04): : 1421 - 1424
  • [39] Research on electromagnetic characters of electron-cyclotron-resonance plasma
    Zhang, HJ
    Ji, XH
    Jiang, HT
    Jiang, XW
    PROCEEDINGS OF THE 2004 CHINA-JAPAN JOINT MEETING ON MICROWAVES, 2004, : 210 - 213
  • [40] Production of large-diameter plasma using multi-slotted planar antenna
    Yasaka, Y
    Nozaki, D
    Koga, K
    Ando, M
    Yamamoto, T
    Goto, N
    Ishii, N
    Morimoto, T
    PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (04): : 530 - 533
12345