ION-BEAM MIXING OF THIN W, TA AND AU FILMS IN CU

被引：5
|
作者：
WESTENDORP, JFM
SARIS, FW
KOEK, B
VIEGERS, MPA
FENNTYE, I
机构：
[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS
[2] AERE,DIV MAT DEV,HARWELL OX11 0RA,OXON,ENGLAND
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 26卷 / 04期
关键词：
D O I：
10.1016/0168-583X(87)90539-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：539 / 546
页数：8
相关论文
共 50 条
  • [41] SUPERCONDUCTING AND STRUCTURAL-PROPERTIES OF Y-BA-CU OXIDE THIN-FILMS PREPARED BY ION-BEAM MIXING
    HOHMUTH, K
    RAUSCHENBACH, B
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 46 (1-4): : 276 - 283
  • [42] ION-BEAM MIXING OF LA(OH)3/CU BILAYERS
    MATHEVET, JP
    TRAVERSE, A
    CHAUMONT, J
    GASGNIER, M
    MEGTERT, S
    JOURNAL OF MATERIALS RESEARCH, 1990, 5 (09) : 1970 - 1975
  • [43] ION BACKSCATTERING ANALYSIS OF MIXING IN AU-CU AND AU-AL THIN-FILMS
    CAMPISANO, SU
    FOTI, G
    GRASSO, F
    RIMINI, E
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1974, : 637 - 640
  • [44] Characterization of Thin Carbon Films Formed on the Iron Surface by Magnetron Sputtering with Ion-Beam Mixing
    Kartapova, T. S.
    Bakieva, O. R.
    Vorob'ev, V. L.
    Kolotov, A. A.
    Nemtsova, O. M.
    Surnin, D. V.
    Mikheev, G. M.
    Gil'mutdinov, F. Z.
    Bayankin, V. Ya.
    PHYSICS OF THE SOLID STATE, 2017, 59 (03) : 613 - 619
  • [45] Characterization of thin carbon films formed on the iron surface by magnetron sputtering with ion-beam mixing
    T. S. Kartapova
    O. R. Bakieva
    V. L. Vorob’ev
    A. A. Kolotov
    O. M. Nemtsova
    D. V. Surnin
    G. M. Mikheev
    F. Z. Gil’mutdinov
    V. Ya. Bayankin
    Physics of the Solid State, 2017, 59 : 613 - 619
  • [46] IMPLANTATION AND ION-BEAM MIXING IN THIN-FILM ANALYSIS
    WILLIAMS, P
    BAKER, JE
    NUCLEAR INSTRUMENTS & METHODS, 1981, 182 (APR): : 15 - 24
  • [47] THE SEQUENCE OF PHASE FORMATION DURING ION-BEAM MIXING OF TI THIN-FILMS ON SI
    MAEX, K
    DEKEERSMAECKER, RF
    VANROSSUM, M
    VANDERWEG, WF
    KROOSHOF, G
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1987, 42 (236): : 141 - 143
  • [48] THE MECHANICAL AND OPTICAL-PROPERTIES OF TIN THIN-FILMS PRODUCED BY ION-BEAM MIXING
    YAN, PX
    MATERIALS CHEMISTRY AND PHYSICS, 1993, 36 (1-2) : 187 - 189
  • [49] STUDY OF TERNARY (TI,AL)N THIN-FILMS PREPARED BY ION-BEAM MIXING
    PENG, DL
    JIANG, SR
    ZHAO, XY
    CHENG, GH
    MATERIALS LETTERS, 1994, 20 (3-4) : 179 - 182
  • [50] IMPROVED ADHESION OF SOLID LUBRICATING FILMS WITH ION-BEAM MIXING
    KOBS, K
    DIMIGEN, H
    HUBSCH, H
    TOLLE, HJ
    PHILIPS TECHNICAL REVIEW, 1988, 44 (01): : 24 - 29
12345