ION-BEAM MIXING OF THIN W, TA AND AU FILMS IN CU

被引：5
|
作者：
WESTENDORP, JFM
SARIS, FW
KOEK, B
VIEGERS, MPA
FENNTYE, I
机构：
[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS
[2] AERE,DIV MAT DEV,HARWELL OX11 0RA,OXON,ENGLAND
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1987年 / 26卷 / 04期
关键词：
D O I：
10.1016/0168-583X(87)90539-8
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：539 / 546
页数：8
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