FRICTION AND WEAR PROPERTIES OF THIN-FILMS OF CARBON WITH DIAMOND STRUCTURE PREPARED BY IONIZED DEPOSITION

被引：21
|
作者：
OKADA, K [1 ]
NAMBA, Y [1 ]
机构：
[1] TOKYO NOKO UNIV,FAC TECHNOL,DEPT ELECT ENGN,TOKYO 184,JAPAN
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 02期
关键词：
D O I：
10.1116/1.575741
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：132 / 135
页数：4
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