MECHANICAL-PROPERTIES OF DIAMOND THIN-FILMS PREPARED BY CHEMICAL VAPOR-DEPOSITION

被引:7
|
作者
SEINO, Y
HIDA, N
NAGAI, S
机构
[1] National Research Laboratory of Metrology, Ibaraki, 305, 1-1-4, Umezono, Tsukuba
关键词
D O I
10.1007/BF00731123
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
[No abstract available]
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页码:515 / 517
页数:3
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