MAGNETRON SPUTTERING LEVELS OXIDE LAYERS

被引：0
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作者：
BURSKY, D
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来源：
ELECTRONIC DESIGN | 1983年 / 31卷 / 14期
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：72 / 72
页数：1
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