MAGNETRON SPUTTERING LEVELS OXIDE LAYERS

被引：0
|
作者：
BURSKY, D
机构：
来源：
ELECTRONIC DESIGN | 1983年 / 31卷 / 14期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：72 / 72
页数：1
相关论文
共 50 条
  • [11] Deposition of AlN layers by collimation magnetron sputtering
    Miernik, Krzysztof
    Walkowicz, Jan
    Smolik, Jerzy
    Surface and Coatings Technology, 1998, 98 (1-3): : 1298 - 1303
  • [12] Deposition of AlN layers by collimation magnetron sputtering
    Miernik, K
    Walkowicz, J
    Smolik, J
    SURFACE & COATINGS TECHNOLOGY, 1998, 98 (1-3): : 1298 - 1303
  • [13] Formation of NiO/YSZ functional anode layers of solid oxide fuel cells by magnetron sputtering
    Ionov, I. V.
    Solov'ev, A. A.
    Lebedinskii, A. M.
    Shipilova, A. V.
    Smolyanskii, E. A.
    Koval'chuk, A. N.
    Lauk, A. L.
    RUSSIAN JOURNAL OF ELECTROCHEMISTRY, 2017, 53 (06) : 670 - 676
  • [14] Formation of NiO/YSZ functional anode layers of solid oxide fuel cells by magnetron sputtering
    I. V. Ionov
    A. A. Solov’ev
    A. M. Lebedinskii
    A. V. Shipilova
    E. A. Smolyanskii
    A. N. Koval’chuk
    A. L. Lauk
    Russian Journal of Electrochemistry, 2017, 53 : 670 - 676
  • [15] Silicon oxide sacrificial layers deposited by pulsed-DC magnetron sputtering for MEMS applications
    Gonzalez-Castilla, Sheila
    Olivares, Jimena
    Clement, Marta
    Vergara, Lucia
    Pulido, Laura
    Iborra, Enrique
    Sangrador, Jesus
    SMART SENSORS, ACTUATORS, AND MEMS IV, 2009, 7362
  • [16] Study of ZrN layers deposited by reactive magnetron sputtering
    Del Re, M
    Gouttebaron, R
    Dauchot, JP
    Leclère, P
    Terwagne, G
    Hecq, M
    SURFACE & COATINGS TECHNOLOGY, 2003, 174 : 240 - 245
  • [17] Formation of AlN Layers at Magnetron Sputtering of Aluminum in Ar
    Kornyushchenko, A. S.
    JOURNAL OF NANO- AND ELECTRONIC PHYSICS, 2014, 6 (02)
  • [18] Optical properties of AlN layers obtained by magnetron sputtering
    Potera, Piotr
    Wisz, Grzegorz
    Szyller, Lukasz
    MATERIALS SCIENCE-POLAND, 2018, 36 (04): : 717 - 721
  • [19] Obtaining thin layers of ZnO with magnetron sputtering method
    Chitanu, Elena
    Ionita, Gheorghe
    RECENT ADVANCES IN CIRCUITS, SYSTEMS AND SIGNALS, 2010, : 317 - +
  • [20] Copper nitride layers synthesized by pulsed magnetron sputtering
    Nowakowska-Langier, Katarzyna
    Chodun, Rafal
    Minikayev, Roman
    Okrasa, Sebastian
    Strzelecki, Grzegorz W.
    Wicher, Bartosz
    Zdunek, Krzysztof
    THIN SOLID FILMS, 2018, 645 : 32 - 37
12345