LOW-TEMPERATURE ELECTRICAL-CONDUCTIVITY OF SILICON IMPLANTED WITH PHOSPHORUS AND ANTIMONY IONS

被引:0
|
作者
ABRAMOV, VV
KULBACHINSKII, VA
KYTIN, VG
TIMOFEEV, AB
ULYASHIN, AG
机构
来源
SOVIET PHYSICS SEMICONDUCTORS-USSR | 1992年 / 26卷 / 05期
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中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
The electrical conductivity of Si:P, Si:Sb, and Si:Sb:P samples heavily doped by ion implantation was measured in the temperature range 4.2 less-than-or-equal-to T less-than-or-equal-to 300 K. The results were interpreted employing a model allowing for a possible energy dependence of the density of delocalized states in an impurity energy band.
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页码:495 / 497
页数:3
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