PRODUCTION AND PROPERTIES OF CONDUCTING CARBON-FILMS

被引：9
|
作者：
PIRKER, K [1 ]
SCHALLAUER, R [1 ]
FALLMANN, W [1 ]
OLCAYTUG, F [1 ]
URBAN, G [1 ]
JACHIMOWICZ, A [1 ]
KOHL, F [1 ]
PROHASKA, O [1 ]
机构：
[1] VIENNA TECH UNIV,LUDWIG BOLTZMANN INST BIOMED MIKROTECH,A-1040 VIENNA,AUSTRIA
来源：
THIN SOLID FILMS | 1986年 / 138卷 / 01期
关键词：
D O I：
10.1016/0040-6090(86)90222-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：121 / 129
页数：9
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