PRODUCTION AND PROPERTIES OF CONDUCTING CARBON-FILMS

被引：9

作者：

PIRKER, K ^{[1
]}

SCHALLAUER, R ^{[1
]}

FALLMANN, W ^{[1
]}

OLCAYTUG, F ^{[1
]}

URBAN, G ^{[1
]}

JACHIMOWICZ, A ^{[1
]}

KOHL, F ^{[1
]}

PROHASKA, O ^{[1
]}

机构：

[1] VIENNA TECH UNIV,LUDWIG BOLTZMANN INST BIOMED MIKROTECH,A-1040 VIENNA,AUSTRIA

来源：

THIN SOLID FILMS | 1986年 / 138卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90222-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：121 / 129

页数：9

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