CHARACTERIZATION OF CHEMICAL VAPOR-DEPOSITION PROCESSES .1.

被引：0
|
作者：
VANDENBREKEL, CHJ [1 ]
机构：
[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS
来源：
PHILIPS RESEARCH REPORTS | 1977年 / 32卷 / 02期
关键词：
D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
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页码：118 / 133
页数：16
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