CHARACTERIZATION OF CHEMICAL VAPOR-DEPOSITION PROCESSES .1.

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|

作者：

VANDENBREKEL, CHJ ^{[1
]}

机构：

[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS

来源：

PHILIPS RESEARCH REPORTS | 1977年 / 32卷 / 02期

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中图分类号：

O6 [化学];

学科分类号：

0703 ;

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页码：118 / 133

页数：16

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