CHARACTERIZATION OF CHEMICAL VAPOR-DEPOSITION PROCESSES .1.

被引：0

作者：

VANDENBREKEL, CHJ ^{[1
]}

机构：

[1] PHILIPS RES LABS,EINDHOVEN,NETHERLANDS

来源：

PHILIPS RESEARCH REPORTS | 1977年 / 32卷 / 02期

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：118 / 133

页数：16

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