APPLICATION OF ELECTROCHEMICAL ETCH-STOP IN PROCESSING SILICON ACCELEROMETER

被引：0
|
作者：
MOTAMDEI, ME
ANDREWS, AP
COLTON, R
STAPLES, EJ
MULLER, RS
CHEN, P
机构：
[1] ROCKWELL INT,THOUSAND OAKS,CA 91360
[2] UNIV CALIF BERKELEY,BERKELEY,CA 94720
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C98 / C98
页数：1
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