Porous silicon photonic crystals: Influence of the etch-stop on the optical response

被引：0
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作者：
Villanueva, J.L.M. [1 ]
Oliveira, A.F. [1 ]
Huanca, D.R. [1 ]
机构：
[1] Instituto de Física e Química, Universidade Federal de Itajubá, Itajuba, MG, Brazil
来源：
36th Symposium on Microelectronics Technology, SBMICRO 2022 - Proceedings | 2022年
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
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学科分类号：
摘要：
Energy gap - Etching - Microcavities - Photonic band gap - Photonic devices - Porosity - Silicon photonics
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