MORPHOLOGY AND PROPERTIES OF SILICON-CARBIDE EPITAXIAL LAYERS GROWN FROM THE VAPOR-PHASE

被引：0
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作者：
PROKOFEVA, NK
MAKAROVA, IA
BELOVA, SA
KOSAGANOVA, MG
DEMYANCHIK, DV
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来源：
INORGANIC MATERIALS | 1983年 / 19卷 / 11期
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T [工业技术];
学科分类号：
08 ;
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页码：1625 / 1629
页数：5
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