ENERGY-DISTRIBUTIONS OF ELECTRONICALLY EXCITED MOLECULES PRODUCED BY ION-BOMBARDMENT OF SILICON

被引：0
|
作者：
WALKUP, R [1 ]
AVOURIS, P [1 ]
机构：
[1] IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.573033
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1662 / 1662
页数：1
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