SINGLE-MODE, PHOSPHORUS-DOPED SILICA WAVE-GUIDES IN SILICON V-GROOVES

Low-loss waveguides are required for hybrid optoelectronic integrated circuits. Single-mode, phosphorus-doped glass waveguides have been formed in silicon V-grooves by chemical vapor deposition. The fabrication process is reproducible, involves few steps, and produces waveguides with a loss on the order of 0.1 dB/cm at a wavelength of 0.633 mum. These waveguides are compatible with passive V - groove fiber alignment and out-of-plane coupling from integrated taps and end facets to surface-mounted optoelectronic devices.