SUCCESSIVE TEM OBSERVATION OF DEFECTS IN SI-IMPLANTED GAAS

被引：0
|
作者：
LIN, TL
JIN, C
JIN, NY
机构：
来源：
MATERIALS LETTERS | 1987年 / 5卷 / 7-8期
关键词：
D O I：
10.1016/0167-577X(87)90105-4
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：255 / 257
页数：3
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