CHEMICAL ETCHING AND ANNEALING INDUCED GAAS(100) SURFACE-PROPERTIES

被引：15

|

作者：

ISMAIL, A

PALAU, JM

LASSABATERE, L

机构：

来源：

APPLIED SURFACE SCIENCE | 1984年 / 17卷 / 03期

关键词：

D O I：

10.1016/0378-5963(84)90024-2

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：363 / 373

页数：11

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