CHEMICAL ETCHING AND ANNEALING INDUCED GAAS(100) SURFACE-PROPERTIES

被引：15
|
作者：
ISMAIL, A
PALAU, JM
LASSABATERE, L
机构：
来源：
APPLIED SURFACE SCIENCE | 1984年 / 17卷 / 03期
关键词：
D O I：
10.1016/0378-5963(84)90024-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：363 / 373
页数：11
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